1.1 Silicon Crystal Structure - University of California ...

1.1 Silicon Crystal Structure - University of California ...

Lecture #43 OUTLINE Short-channel MOSFET (reprise) SOI technology Reading: Finish Chapter 19.2 Spring 2007 EE130 Lecture 43, Slide 1 Short-Channel MOSFET OUTPUT CHARACTERISTICS TRANSFER CHARACTERISTICS 0.4 ) I ds (mA/m) L = 0.15 m V gs = 2.5V Vt = 0.4 V

0.3 V gs = 2.0V 0.2 V gs = 1.5V 0.1 V gs = 1.0V 0.0 0 0.03 1 V ds (V) 2 2.5 IDS does not saturate with increasing VDS due to DIBL, and also Vgs = 2.5V L = 2.0 m channel-length modulation

for VDS>VGS-VT Vt = 0.7 V 0.02 Spring 2007 EE130 Lecture 43, Slide 2 Silicon on Insulator (SOI) Technology TSOI Transistors are fabricated in a thin single-crystal Si layer on top of an electrically insulating layer of SiO2 Simpler device isolation savings in circuit layout area Low junction capacitances faster circuit operation Better soft-error immunity No body effect Higher cost Spring 2007 EE130 Lecture 43, Slide 3 Partially Depleted SOI (PD-SOI) TSOI 2 s (2F ) WT , where WT qN body

Floating body effect (history dependent): 1. When a PD-SOI NMOSFET is in the ON state, at moderate-to-high VDS, holes are generated via impact ionization near the drain 2. Holes are swept into the neutral body, collecting at the source junction 3. The body-source pn junction is forward biased 44 VT is lowered IDsat increases kink in output ID vs. VDS curve Spring 2007 EE130 Lecture 43, Slide 4 Fully Depleted SOI (FD-SOI) TSOI

2 s (2F ) WT , where WT qN body No floating body effect! VT is sensitive to SOI film thickness Poorer control of short-channel effects due to fringing electric field from drain Gate Elevated S/D contact structure needed to reduce RS, RD Source SOI Drain SiO2 Silicon Substrate Spring 2007 EE130 Lecture 43, Slide 5

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